DQRF RF Power Tuning DevicePower Supplies
The DQRF RF Power Tuning Device is a high-frequency power supply for plasma generation/control in industrial processes (semiconductor manufacturing, medical tech, surface treatment like PVD, PECVD, etching). DQRF-13.56: 3 kW solid-state model (13.56 MHz) with advanced semiconductor tech for reliability.
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The device offers intuitive touchscreen control, high energy conversion efficiency, and optimized circuit design for stable output. Modular structure eases maintenance, integrated intelligent protection and real-time monitoring ensure safety and extend service life. Customizable for diverse application needs.
Core Advantages & Features
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High Energy DensityCompact structure with high efficiency.
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Market AdaptabilityAdvanced sweep-frequency and pulse characteristics for precise semiconductor process matching.
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Ease of MaintenanceReal-time parameter display and self-diagnosis simplify management.
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Technical Parameters
| Technical Parameters | |
|---|---|
| Maximum output power | 3000W CW with 50 Ω load |
| Power range | 30 W - 3000 W continuously adjustable |
| Maximum reflected power | 600 W |
| Operating frequency | 13.56 MHz ±5% with frequency sweep capability |
| Load impedance | 50 Ω |
| RF power control modes | P forward, P delivered or Process feedback |
| RF power control accuracy | ±1% of setpoint or ±0.1% of full rated power |
| Power rise time | < 10 ms |
| Power shutdown time | < 1 ms |
| Pulse mode | Supports multi-level pulse operation |
| Pulse rise time (10% to 90%) | < 2 μs |
| Pulse fall time | < 2 μs |
| Pulse frequency range | 0 Hz~50 kHz |
| Duty cycle range | 0.1%-99.9% |
| Number of pulse levels | 4 levels |
| Matching time in frequency tuning mode | < 100 μs |
| Harmonics | < -40 dBc |
| Spurious | < -50 dBc |
| Output connector | 50 Ohm 7/16 DIN female coaxial connector |
| Remote control interface | Serial port, ethernet, etherCAT |
| Multi-unit RF power supply synchronization | SMA female connector |
| CEX input / output level | TTL |
| Protection functions | DC overcurrent protection, VSWR protection, overtemperature protection |
| Cooling methods | Water cooling and forced air cooling |
| Air cooling | Minimum air flow: 150 m³/h, air temperature: 5-40°C |
| Water cooling | Cooling water flow: >5lpm, cooling water pressure: >2bar |
| Dimensions (L*W*H) | 583mm*271mm*132 mm |
| Installation clearance | 100 mm (all sides) |
| Input voltage | 380 VAC or 208 VAC three-phase |
| Input current | 20A at full power |
| Input frequency | 50~60 Hz |
| Power factor | 95% |
| Overall efficiency | >70% (at full power, 50 Ω load) |
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